Fiber-optic Fabry-Perot interferometer based high sensitive cantilever microphone
Release Time:2023-11-06 Hits:
Date of Publication: 2022-10-02
Journal: SENSORS AND ACTUATORS A PHYSICAL
Institution: 光电工程与仪器科学学院
Volume: 279
Page Number: 107-112
ISSN: 0924-4247