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个人信息Personal Information
副教授
硕士生导师
性别：男
毕业院校：大连理工大学
学位：博士
所在单位：光电工程与仪器科学学院
学科：光学工程
办公地点：物理学院233房间
联系方式：xlzhou@dlut.edu.cn
电子邮箱：xlzhou@dlut.edu.cn
High-Sensitivity Fabry-Perot Interferometric Acoustic Sensor for Low-Frequency Acoustic Pressure Detections
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论文类型：期刊论文
发表时间：2017-12-15
发表刊物：JOURNAL OF LIGHTWAVE TECHNOLOGY
收录刊物：SCIE、EI、Scopus
卷号：35
期号：24
页面范围：5276-5279
ISSN号：0733-8724
关键字：Acoustic pressure detection; Fabry-Perot; fiber optics sensors
摘要：We demonstrate a fiber-optic Fabry-Perot acoustic sensor based on a Parylene-C diaphragm of 500 nm in thickness. The excellent diaphragm forming ability and good adhesion of Parylene-C make the sensor fabricate up to 9 mm in diameter. Acoustic testing demonstrates a high dynamic pressure sensitivity of 2239 nm/Pa and a noise limited equivalent acoustic signal level of 22.1 mu Pa/Hz(1/2) at the frequency of 20 Hz. The frequency response exhibits an obvious peak at the frequency of 13 Hz. The sensor can be used for low-frequency acoustic pressure detections, which is necessary in surveillance and security systems.