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论文类型：期刊论文

发表时间：2018-05-01

发表刊物：SENSORS AND ACTUATORS B-CHEMICAL

收录刊物：SCIE、EI、Scopus

卷号：260

页面范围：357-363

ISSN号：0925-4005

关键字：Fiber-optic; Parylene-C diaphragm; Acoustic sensor; Photoacoustic spectroscopy; Multi-gas detection

摘要：We demonstrate a high-sensitivity fiber-optic low-frequency acoustic sensor based on a thin Parylene-C diaphragm. The excellent diaphragm forming ability and good adhesion of Parylene-C make the sensor fabricate up to 9 mm in diameter. For the acoustic pressure of 50 mPa at the frequency of 30 Hz, acoustic testing demonstrates a signal to noise ratio of 37 dB, which is almost seven times higher than a conventional electric microphone. The low-frequency acoustic sensor, together with an infrared thermal radiation source, and a non-resonant cell, constitutes a photoacoustic detection system for multiple trace gases analysis. The detection limits of acetylene (C2H2), methane (CH4), ethane (C2H6), ethylene (C2H4), carbon monoxide (CO) and carbon dioxide (CO2) are achieved to be 0.11, 0.21, 0.13, 0.16, 0.15 and 0.48 parts-per-million, respectively. The detection system is applied to detect mixture of the six gases, and the average deviations of the six gases are not more than 5.0%. (c) 2018 Elsevier B.V. All rights reserved.