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Prognostics for Semiconductor Sustainability: Tool Failure Behavior Prediction in Fabrication Processes

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Date of Publication:2024-04-25

Journal:IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS

ISSN No.:2168-2216

Key Words:ADAPTIVE VIRTUAL METROLOGY; DEFECT PATTERNS; FAULT-DETECTION; IDENTIFICATION; MODEL; NEAREST-NEIGHBOR RULE; NEURAL-NETWORK; REALIZING PRESCRIPTIVE MAINTENANCE

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