Prognostics for Semiconductor Sustainability: Tool Failure Behavior Prediction in Fabrication Processes
Release Time:2024-08-27 Hits:
Date of Publication: 2024-04-25
Journal: IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS
ISSN: 2168-2216
Key Words: ADAPTIVE VIRTUAL METROLOGY; DEFECT PATTERNS; FAULT-DETECTION; IDENTIFICATION; MODEL; NEAREST-NEIGHBOR RULE; NEURAL-NETWORK; REALIZING PRESCRIPTIVE MAINTENANCE