Prognostics for Semiconductor Sustainability: Tool Failure Behavior Prediction in Fabrication Processes
Release Time:2026-09-10 Hits:
Indexed by: Journal Papers
Document Code: 390510
Date of Publication: 2024-06-01
Journal: IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS
Volume: 54
Issue: 6
Page Number: 3450-3460
ISSN: 2168-2216
Key Words: ADAPTIVE VIRTUAL METROLOGY; DEFECT PATTERNS; FAULT-DETECTION; IDENTIFICATION; MODEL; NEAREST-NEIGHBOR RULE; NEURAL-NETWORK; REALIZING PRESCRIPTIVE MAINTENANCE