Prognostics for Semiconductor Sustainability: Tool Failure Behavior Prediction in Fabrication Processes
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发表时间：2024-08-27
发表时间：2024-04-25
发表刊物：IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS
ISSN号：2168-2216
关键字：ADAPTIVE VIRTUAL METROLOGY; DEFECT PATTERNS; FAULT-DETECTION; IDENTIFICATION; MODEL; NEAREST-NEIGHBOR RULE; NEURAL-NETWORK; REALIZING PRESCRIPTIVE MAINTENANCE
