Prognostics for Semiconductor Sustainability: Tool Failure Behavior Prediction in Fabrication Processes
点击次数：
发布时间：2026-09-10
论文类型：期刊论文
论文编号：390510
发表时间：2024-06-01
发表刊物：IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS
卷号：54
期号：6
页面范围：3450-3460
ISSN号：2168-2216
关键字：ADAPTIVE VIRTUAL METROLOGY; DEFECT PATTERNS; FAULT-DETECTION; IDENTIFICATION; MODEL; NEAREST-NEIGHBOR RULE; NEURAL-NETWORK; REALIZING PRESCRIPTIVE MAINTENANCE
