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朱祥龙
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教授   博士生导师   硕士生导师

性别: 男

毕业院校: 大连理工大学

学位: 博士

所在单位: 机械工程学院

学科: 机械制造及其自动化

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联系方式: 15998535043

电子邮箱: zhuxianglong@dlut.edu.cn

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行星式双面研磨轨迹均匀性研究

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发表时间: 2015-01-01

发表刊物: 机械研究与应用

期号: 6

页面范围: 41-43

ISSN号: 1007-4414

摘要: Sapphire is a kind of functional crystal material with excellent properties and widely used in the semiconductor and optoelectronic industry. Planetary double-side lapping is one of the most important methods in processing sapphire, the machi-ning precision and surface quality of work pieces are affected by the uniformity of abrasive trajectory significantly. In this pa-per, trajectory and velocity equations of abrasive are set up through the kinematical analysis of double-side lapping, and then a quantitative evaluation method of trajectory uniformity based on the Matlab discrete statistics is presented. With this method, variance value of abrasive's trajectory uniformity under given parameters is calculated and offers reference for the optimization of double-side lapping parameters.

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