Design and fabrication of micro-coil sensor array by using UV-LIGA process

Release Time:2019-03-12  Hits:

Indexed by: Conference Paper

Date of Publication: 2012-01-01

Page Number: 585-588

Prev One:Design and fabrication of micro-coil sensor array by using UV-LIGA Process

Next One:基于重心驱动的设计方法研究及其在高性能机床开发中的应用