location： Current position: Home_ENG >> Scientific Research >> Paper Publications

用UV-LIGA工艺制备MEMS铜线圈

Hits:

Indexed by:期刊论文

Date of Publication:2013-01-01

Journal:光学精密工程

Included Journals:PKU、ISTIC

Volume:21

Issue:supl

Page Number:69-75

Pre One:针对少实时任务应用的嵌入式Linux改进

Next One:Design and fabrication of micro-coil sensor array by using UV-LIGA Process
Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep