Hits:
First Author:daihengzhen
Disigner of the Invention:qianmin,zhangjun,Renke Kang,Dongming Guo
Application Number:CN201010100621.9
Authorization Date:2010-01-22
Authorization number:CN101750186A
Pre One:一种化学机械抛光单晶氧化镁基片用的抛光液
Next One:超精密低损伤磨削硅片的软磨料砂轮