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一种化学机械抛光单晶氧化镁基片用的抛光液

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First Author:Renke Kang

Disigner of the Invention:wangke,jinzhuji,Dongming Guo,Dong Zhigang

Application Number:CN201010010121.6

Authorization Date:2010-01-12

Authorization number:CN101760138A

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