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面向微纳米加工及检测技术的压电微器件关键技术问题研究

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Leading Scientist:Yan Cui

Supported by:省、市、自治区科技项目

Status:结题

Supported by:辽宁省教育厅

Nature of Project:纵向

Project Approval Number:LS2010038

Date of Project Approval:2010-01-01

Scheduled completion time:2012-12-31

Date of Project Initiation:2010-01-01

Date of Project Completion:2023-09-13

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