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相位角对容性耦合电非对称放电特性的影响

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Indexed by:期刊论文

Date of Publication:2018-11-05

Journal:物理学报

Volume:67

Issue:22

Page Number:288-300

ISSN No.:1000-3290

Key Words:容性耦合等离子体;流体模拟;电非对称效应;径向均匀性

Abstract:电非对称效应作为一种新兴技术,被广泛用于对离子能量和离子通量的独立调控.此外,在改善等离子体的径向均匀性方面,电非对称效应也发挥了重要作用.本文采用二维流体力学模型,并耦合麦克斯韦方程组,系统地研究了容性耦合氢等离子体中当放电由多谐波叠加驱动时,不同谐波阶数k下的电非对称效应,重点观察了相位角θn对自偏压以及等离子体径向均匀性的影响.模拟结果表明:在同一谐波阶数下,自偏压随相位角θn的变化趋势不尽相同,且当k增大(k>3)时,自偏压随最高频相位角θk的变化范围逐渐减小.此外,通过调节相位角θn,可以改变轴向功率密度和径向功率密度的相对关系,进而实现对等离子体径向均匀性的调节.研究结果对于利用电非对称效应优化等离子体工艺过程具有一定的指导意义.

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