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升级冶金级Si衬底上ECR-PECVD沉积多晶Si薄膜

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Date of Publication:2022-10-09

Journal:半导体技术

Affiliation of Author(s):材料科学与工程学院

Issue:2

Page Number:117-120

ISSN No.:1003-353X

Note:新增回溯数据

Pre One:高热导石墨衬底上的ZnO基MOS器件生长及表征

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