location: Current position: Home >> Scientific Research >> Paper Publications

反应等离子体中尘埃空洞形成的实验研究

Hits:

Date of Publication:2022-10-10

Journal:物理学报

Volume:54

Issue:10

Page Number:4794-4798

ISSN No.:1000-3290

Abstract:The void in the sheath of a radio-frequency(rf) dusty plasma is investigated experimentally. Dust particles in our experiment are created in situ using mixed reactive gases silane and ethane. Dust particles in radio frequency discharges form crystalline structure and display instabilities under certain conditions. The behaviour of the dust void as a function of rf power and gas pressure is studied.

Note:新增回溯数据

Pre One:双放电腔微波-ECR等离子体源增强磁控溅射沉积技术

Next One:同轴介质阻挡放电发生器介质层等效电容和负载特性研究