Current position: Home >> Scientific Research >> Research Projects

磨削硅片的软磨料砂轮

Hits:

Leading Scientist:Renke Kang

Supported by:企事业单位委托科技项目

Status:结题

Supported by:无锡机床股份有限公司

Nature of Project:横向

Date of Project Approval:2009-03-01

Scheduled completion time:2012-12-31

Date of Project Initiation:2009-03-01

Date of Project Completion:2012-12-31

Pre One:高温合金加工表面完整性研究

Next One:大尺寸晶圆精密磨削减薄设备的研究与产业化