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跨尺度安保机构的MEMS工艺技术开发

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Leading Scientist:杜立群

Project Participants:songmancang

Supported by:企事业单位委托科技项目

Status:结题

Supported by:南京理工大学

Nature of Project:横向

Date of Project Approval:2020-06-30

Scheduled completion time:2021-06-30

Date of Project Initiation:2020-06-30

Date of Project Completion:2023-07-14

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