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静电感应协同声表面波的掩膜电解加工新方法

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Leading Scientist:杜立群

Project Participants:huangzhiping,songmancang,Yan Cui

Supported by:国家自然科学基金项目

Sub-Class of Project:面上项目

Status:在研

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:52375561

Date of Project Approval:2023-08-24

Scheduled completion time:2027-12-31

Date of Project Initiation:2024-01-01

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