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一种基于聚酰亚胺的柔性静电驱动MEMS继电器的制造方法

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First Author:liujunshan

Disigner of the Invention:舒振,赵欣悦,单晗,yinpenghe,张悦,duliqun,xuzheng

Authorization number:ZL2018103 75861.6

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