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Research on Ti-Si-N films prepared by magnetron sputtering

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Indexed by:期刊论文

Date of Publication:2012-01-01

Journal:RARE METALS

Volume:31

Issue:2

Page Number:182-187

Pre One:Ti-Si-N films prepared by magnetron sputtering

Next One:Influence of boron contents on the structure and hardness properties of Al-Mg-B films by R.F. magnetron sputtering
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