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局部蒸发去除多晶硅中硼的方法及装置

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First Author:Yi Tan

Disigner of the Invention:dongwei,jiangdachuan,李国斌

Affilication of Author(s):材料科学与工程学院

Application Number:CN101708849A

Authorization number:CN200910220058.6

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Next One:一种底部气冷的多晶硅半熔铸锭装置及工艺
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