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常压下平板电极射频电容耦合氩氧/氩氮等离子体发生器

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First Author:Shouzhe Li

Disigner of the Invention:武启

Affilication of Author(s):物理学院

Application Number:CN101835339A

Authorization number:CN201010180725.5

Pre One:一种利用微波等离子体处理废气的装置

Next One:一种对玻璃及高分子材料表面改性的大气压沿面放电等离子体装置
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