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个人信息Personal Information
教授
博士生导师
硕士生导师
主要任职：光电工程与仪器科学学院院长、党委副书记
其他任职：辽宁省先进光电子技术重点实验室副主任，大连市新型功能材料与光电子器件重点实验室主任，中国超材料学会理事，中国机械工程学会极端制造分委员会委员，国际先进材料学会会士，Microsystems&Nanoengineering、chemosensors等期刊副编辑
性别：男
毕业院校：布里斯托尔大学
学位：博士
所在单位：光电工程与仪器科学学院
学科：光学工程. 电磁场与微波技术. 光学. 测试计量技术及仪器. 精密仪器及机械
办公地点：研教楼706
联系方式：0411-84706156
电子邮箱：caotun1806@dlut.edu.cn
Simulation analysis of thermal-actuated PDMS film microvalve
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论文类型：期刊论文
发表时间：2012-08-01
发表刊物：Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument
收录刊物：EI、PKU、ISTIC、Scopus
卷号：33
期号：8 SUPPL.
页面范围：79-82
ISSN号：02543087
摘要：This paper takes advantage of ANSYS10.0 to carry on both of the simulation and optimization of a thermal-actuated PDMS film microvalve, focusing on different structural parameters of heater, cavity and thickness of the PDMS film. The results show that although the narrower the heater is, the better the heat accumulates, the temperature distribution won't change largely when the size decreases below 0.4 mm. The displacement of the film is getting larger with the increase of radius of the cavity. An irregular result will happen during the simulation under different thicknesses of PDMS films. These simulation results will provide valuable information in the design of microvalve in the future.