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发表时间：2022-10-09

发表刊物：光学精密工程

所属单位：机械工程学院

卷号：26

期号：11

页面范围：2714-2722

ISSN号：1004-924X

摘要：The clearance size of the air bearing of the dynamic pressure gyro motor is an important index to determine the motor performance and running stability. To improve the precision, automation degree, and rapid batch measurement capacity of the clearance measurement for the dynamic pressure gyro motor, a measurement equipment was developed. In this work, the internal clearance was transformed into an external micro-displacement by applying external force to the rotor. The equipment, designed based on a modular concept, was composed of a clamping module, an automatic force application module, and a displacement measurement module. The clamping module provided resilient double-clamp mounting of the stator, which was conducive to protecting the motor and ensuring smooth force application. The automatic force application module was a 3-D precision motion platform integrating one triaxial force transducer. During measurement, the rotor and force transducer were connected by a pneumatic gripper, thereby the rotor would follow the motion of the platform and generate a relative displacement because of the internal clearance. The force transducer was used for precise control of the force application and the self-aligning centering of the stator. The displacement measurement module was a 2-D precision motion platform integrating double inductance probes, which measured micro-displacement based on a relative measurement principle. Experimental results show that the measurement accuracy is superior to 0.3 μm. The equipment is capable of controllable and continuous force application, making it suitable for batch measurement. © 2018, Science Press. All right reserved.

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