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大功率低压射频感性耦合负氢离子源的物理基础研究

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Leading Scientist:wangyounian

Project Participants:Chunsheng Ren,zhaoshuxia,Fei Gao,Zhang YuRu

Supported by:国家科技部

Status:结题

Supported by:科学技术部

Nature of Project:纵向

Project Approval Number:2015GB114001

Date of Project Approval:2014-12-31

Scheduled completion time:2019-12-31

Date of Project Initiation:2015-01-01

Pre One:碳氟性等离子体的放电机理和刻蚀过程的研究