Hits:
Leading Scientist:zhaoshuxia
Supported by:企事业单位委托科技项目
Status:结题
Supported by:北京北方微电子基地设备工艺研究中心有限责任公司
Nature of Project:横向
Date of Project Approval:2013-01-25
Scheduled completion time:2013-06-30
Date of Project Initiation:2013-01-25
Date of Project Completion:2013-06-30
