大连理工大学主页平台管理系统 liufeng--Home-- DC substrate bias enables preparation of superior-performance TiN electrode films over a wide process window

刘峰

Engineer

Gender:Male

Alma Mater:吉林大学

Degree:Doctoral Degree

School/Department:化工海洋与生命学院

Discipline:Polymer Chemistry and Physics

Business Address:D04-110

Contact Information:0427-2631844

E-Mail:liufeng@dlut.edu.cn

Paper Publications

DC substrate bias enables preparation of superior-performance TiN electrode films over a wide process window

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Date of Publication:2022-10-06

Journal:MATERIALS RESEARCH BULLETIN

Volume:119

ISSN No.:0025-5408

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