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发表时间：2022-10-10

发表刊物：Guangxue Jingmi Gongcheng/Optics and Precision Engineering

所属单位：机械工程学院

卷号：29

期号：8

页面范围：1795-1803

ISSN号：1004-924X

摘要：Subsurface damage is generated during the lapping process of quartz glass. The detection of subsurface damage has been a research focus in the lapping process optimization of quartz glass. This study proposes a nondestructive detection method to detect the subsurface damage of lapped quartz glass. By combining the polarized laser scattering method with the confocal scattering microscopy method, a polarized laser confocal nondestructive detection method for the subsurface damage of lapped quartz glass was proposed, and a nondestructive detection system was developed. In addition, the subsurface damage of lapped quartz glass was detected, and the cross-sectional microscopic destructive method was used to verify the nondestructive detection results. The comparison results of nondestructive detection and destructive detection indicate that the relative error of subsurface damage depth is less than 5%, and the subsurface crack configuration is consistent with that of the destructive detection method. The polarized laser confocal nondestructive detection method can quantitatively detect the subsurface damage of lapped quartz glass. Thus, the study provides an effective detection method for the optimization of quartz glass processing. © 2021, Science Press. All right reserved.

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