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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：大连理工大学
学位：博士
所在单位：光电工程与仪器科学学院
学科：光学工程. 测试计量技术及仪器
办公地点：大连理工大学主楼东侧楼（物理学院）223室
联系方式：Tel: 0411-84706492-202 Fax:0411-84706491
电子邮箱：yiyinggu@dlut.edu.cn
Fabrication of polymer-based multimode interference optical splitters by UV-based soft imprint lithography
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论文类型：会议论文
发表时间：2016-04-26
收录刊物：EI、CPCI-S、Scopus
卷号：9685
关键字：Polymer-based optical splitter; multimode interference; UV-based soft imprint lithography
摘要：A polymer-based multimode interference (MMI) optical splitter chip has been fabricated through UV-based soft imprint lithography (Soft UV-NIL) technique. Propagation loss and bending loss are considered during the chip design in order to decrease the insertion loss. UV curable fluorinated acrylate resin is used due to its low material absorbing loss. 1x4 cascaded MMI splitter is fabricated and measured at 1550 nm optical wavelength and an average 12.38 dB insertion loss is obtained together with an 1.23 dB uniformity.