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提高等离子体径向均匀性的等离子体腔室

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First Author:Fei Gao

Disigner of the Invention:wangyounian

Authorization number:CN106298425A

Pre One:一种基于射频放电的正负离子源

Next One:一种细长管射频感应耦合等离子体源反应器
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