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个人信息Personal Information
副教授
博士生导师
硕士生导师
性别：男
出生日期：1987-01-01
毕业院校：大连理工大学
学位：博士
所在单位：物理学院
学科：等离子体物理
办公地点：大连理工大学 物理学院303
电子邮箱：qzzhang@dlut.edu.cn
扫描关注
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粒子模型(PIC/MC)，刻蚀模型，Comsol流体，0D化学反应模型-数值建模
射频容性耦合等离子体源中电子加热机制
脉冲调制容性放电物理机理
多孔材料-等离子体低温刻蚀技术研究（与IMEC合作）
等离子体刻蚀中充电效应的数值模拟研究
射频容性耦合等离子体/感性耦合等离子体中的电非对称效应(多频偏置技术）
直流/射频容性耦合等离子体刻蚀机 -放电机制模拟
大气压流柱放电机制模拟
- Sun, Jing-Yu, 张权治, Liu, Jia-Rui, 宋远红, 王友年.Electrical asymmetry effect in inhomogeneously magnetized capacitively coupled plasmas[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2021,29(11)
- 张权治.H2S Decomposition into？H2 and？S2 by？Plasma Technology: Comparison of？Gliding Arc and？Microwave Plasma[J],Plasma Chemistry and Plasma Processing,2021,40:1163-1187
- 吕翔云, 高飞, 张权治, 王友年.Spatio-temporal measurements of overshoot phenomenon in pulsed inductively coupled discharge[J],Chin. Phys. B,2021,30(4):45202-
- Sun, Jing-Yu, Zhang, Quan-Zhi, Liu, Yong-Xin, Wang, You-Nian, QZ (reprint author), Dalian Univ Technol, Sch Phys, Dalian 116024, Peoples R China..Realistic treatment for secondary electron emission in hybrid DC/DF capacitively coupled discharge[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2020,29(2)
- Schuengel, E., Czarnetzki, U., Wang, Y-N, Hou, L-J, Schulze, J., Iwashita, S., Zhang, Q-Z, Schungel, E (reprint author), Ruhr Univ Bochum, D-44780 Bochum, Germany..Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2011,44(28)
- Liu, Yong-Xin, Zhang, Quan-Zhi, Jiang, Wei, Hou, Lu-Jing, Xiang-Zhan, Lu, Wen-Qi, Wang, You-Nian, YX (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas[J],PHYSICAL REVIEW LETTERS,2011,107(5):055002
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