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论文类型：期刊论文

发表时间：2007-12-01

发表刊物：2nd International Symposium on Functional Materials

收录刊物：SCIE、EI、CPCI-S、Scopus

卷号：T129

页面范围：209-212

ISSN号：0031-8949

摘要：Microforce sensors made of PT/PZT/PT thin films were designed in the micro-Newton range. The PT/PZT/PT thin films were deposited on the Pt/Ti/SiO2/Si substrate by the sol-gel process. Structure and the crystallinity of the deposited films were characterized. The sensing properties of the microforce sensors were measured in static state and in quasi-static state. The sensitivities of the microforce sensors with two different sizes were 0.004 and 0.040mV mu N-1 in the quasi-static state.