激发频率对硅烷等离子体放电参数的影响
Release Time:2019-03-11 Hits:
Indexed by: Conference Paper
Date of Publication: 2007-08-20
Page Number: 10
Key Words: 等离子体放电;激发频率;电子密度;鞘层;碰撞频率;离子能量;沉积速率;电场强度;连续性方程;自洽;
Abstract: ~~
Release Time:2019-03-11 Hits:
Indexed by: Conference Paper
Date of Publication: 2007-08-20
Page Number: 10
Key Words: 等离子体放电;激发频率;电子密度;鞘层;碰撞频率;离子能量;沉积速率;电场强度;连续性方程;自洽;
Abstract: ~~