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Plasma source ion implantation （PSII） and PSII enhanced film deposition

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Indexed by:期刊论文

Date of Publication:1993-01-01

Journal:Chinese Physics Letters

Included Journals:CSCD

Volume:10

Issue:增刊

Page Number:355

ISSN No.:0256-307X

Key Words:离子注入; 等离子体源; 薄膜; 淀积

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