Release Time:2019-03-12  Hits:

Indexed by: Journal Article

Date of Publication: 1993-01-01

Journal: Chinese Physics Letters

Included Journals: CSCD

Volume: 10

Issue: 增刊

Page Number: 355

ISSN: 0256-307X

Key Words: 离子注入; 等离子体源; 薄膜; 淀积