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论文类型：期刊论文

发表时间：2007-01-01

发表刊物：Key Engineering Materials

收录刊物：EI

卷号：329

页面范围：415-420

ISSN号：10139826

摘要：We have developed the laser nanoprocessing technique by the integration of the fs laser and near-field scanning microscopy (NSOM). The second harmonic femtosecond laser working in the optical near-field with the assistance of NSOM equipment was applied to expose the photosensitive polymer material. The nanopatterns with feature size smaller than the laser wavelength can be fabricated. The optical diffraction limitation is therefore broken through by the near-field nanoprocessing. It was found in our experiment that the nanofabrication feature size depends strongly on the gap between the fiber probe tip and the substrate surface, as well as the laser coupling efficiency. The approach offers the advantages of high precision, speed and selectivity in nanopatterning, and is promising to be used in data storage device manufacture for higher density recording.