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磁控溅射装置二维计算平台开发

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Leading Scientist:Yue Liu

Supported by:企事业单位委托科技项目

Status:结题

Supported by:辽宁科技大学

Nature of Project:横向

Date of Project Approval:2012-04-09

Scheduled completion time:2014-04-08

Date of Project Initiation:2012-04-09

Date of Project Completion:2020-06-30

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