Hits:

Indexed by:期刊论文

Date of Publication:2018-02-01

Journal:CHINESE PHYSICS B

Included Journals:SCIE、EI

Volume:27

Issue:2

ISSN No.:1674-1056

Key Words:RF glow discharge; secondary electron emission; fluid model

Abstract:A one-dimensional (1D) fluid model of capacitive RF argon glow discharges between two parallelplate electrodes at low pressure is employed. The influence of the secondary electron emission on the plasma characteristics in the discharges is investigated numerically by the model. The results show that as the secondary electron emission coefficient increases, the cycleaveraged electric field has almost no change; the cycleaveraged electron temperature in the bulk plasma almost does not change, but it increases in the two sheath regions; the cycleaveraged ionization rate, electron density, electron current density, ion current density, and total current density all increase. Also, the cycleaveraged secondary electron fluxes on the surfaces of the electrodes increase as the secondary electron emission coefficient increases. The evolutions of the electron flux, the secondary electron flux and the ion flux on the powered electrode increase as the secondary electron emission coefficient increases. The cycleaveraged electron pressure heating, electron Ohmic heating, electron heating, and ion heating in the two sheath regions increase as the secondary electron emission coefficient increases. The cycleaveraged electron energy loss increases with increasing secondary electron emission coefficient.