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等离子体反应腔室的多场耦合模型建立及实验验证

Release Time:2016-08-09  Hits:

Leading Scientist: 王友年

Institution: 物理学院

Project Source: 主管部门科技项目

Project Level: Provincial and Ministerial Level

Status: 结题

Supported by: The Center for Science and Technology Development of the Ministry of Education

Nature of Project: 纵向

Project Approval Number: 20090041110026

Date of Project Approval: 2009-12-02

Scheduled Completion Time: 2012-12-31

Date of Project Initiation: 2010-01-01

Date of Project Completion: 2012-12-31

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