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王友年
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Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
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Song, Sha-Sha, Liu, Wei, Yin, Shuai, YongXin Liu, Fei Gao, wangyounian, Zhao, Yong-Tao.Numerical investigation of ion energy and angular distributions in a dc-biased H-2 inductively coupled discharge[J],PHYSICS OF PLASMAS,2021,27(9)
Sun, Jing-Yu, Zhang Quanzhi, Liu, Jia-Rui, SONG Yuan-Hong, wangyounian.Electrical asymmetry effect in inhomogeneously magnetized capacitively coupled plasmas[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2021,29(11)
Zhang YuRu, Bogaerts, Annemie, wangyounian.Fluid simulation of the phase-shift effect in Ar/CF4 capacitively coupled plasmas[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2021,45(48)
Zhang YuRu, xuxiang, Bogaerts, Annemie, wangyounian.Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: II. Radial uniformity of the plasma characteristics[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2021,45(1)
zhaoshuxia, Fei Gao, wangyounian.Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2021,42(22)
Wang, Xi-Feng, Jia, Wen-Zhu, SONG Yuan-Hong, zhangyingying, daizhongling, wangyounian.Hybrid simulation of electron energy distributions and plasma characteristics in pulsed RF CCP sustained in Ar and SiH4/Ar discharges[J],PHYSICS OF PLASMAS,2021,24(11)
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电动力学
射频等离子体物理学
数学物理方法
Research Projects
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电子加热法离子引出理论模拟和试验验证, 企事业单位委托科技项目, 2022/04/27-2023/07/14, 结题
半导体反应器中等离子体机理和关键应用研究, 企事业单位委托科技项目, 2021/09/08-2023/07/14, 结题
等离子体诊断服务合同, 企事业单位委托科技项目, 2021/12/22-2024/07/02, 结题
面向PECVD非晶硅镀膜装备的等离子体实验诊断平台搭建及关键技术研发项目, 企事业单位委托科技项目, 2022/11/01, 在研
面向PECVD非晶硅镀膜装备的等离子体数值模拟研发项目, 企事业单位委托科技项目, 2022/11/01, 在研
吸气式电推进系统放电等离子体仿真研究, 企事业单位委托科技项目, 2022/12/22, 在研