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半导体反应器中等离子体机理和关键应用研究

Release Time:2024-01-09  Hits:

Leading Scientist: 张权治

Project Participants: 王友年,Fei Gao

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: Changjiang Storage Technology Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2021-09-08

Scheduled Completion Time: 2022-09-07

Date of Project Initiation: 2021-09-08

Date of Project Completion: 2023-07-14

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