面向PECVD非晶硅镀膜装备的等离子体实验诊断平台搭建及关键技术研发项目
Release Time:2024-07-29 Hits:
Leading Scientist: 赵凯
Project Participants: 王友年,YongXin Liu,Fei Gao
Project Source: 企事业单位委托科技项目
Status: 在研
Supported by: Suzhou Maxon Technology Co., Ltd.
Nature of Project: 横向
Date of Project Approval: 2022-11-01
Scheduled Completion Time: 2025-11-01
Date of Project Initiation: 2022-11-01