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射频等离子体特性研究

Release Time:2024-11-01  Hits:

Leading Scientist: 周大鹏

Project Participants: 王友年,Fei Gao

Project Source: 企事业单位委托科技项目

Status: 在研

Supported by: Shenzhen Hengyunchang Vacuum Technology Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2024-04-30

Scheduled Completion Time: 2027-04-30

Date of Project Initiation: 2024-04-30

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