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圆形射频等离子体源的开发

Release Time:2024-12-03  Hits:

Leading Scientist: 高飞

Project Participants: 王友年

Project Source: 企事业单位委托科技项目

Status: 在研

Supported by: OptoNano Technology (Shenzhen) Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2023-07-30

Scheduled Completion Time: 2024-07-31

Date of Project Initiation: 2023-08-01

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