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面向半导体刻蚀工艺的射频技术研发及射频电源设备测试平台研制

Release Time:2024-12-23  Hits:

Leading Scientist: 刘永新

Project Participants: 王友年,Fei Gao,赵凯

Project Source: 企事业单位委托科技项目

Status: 在研

Supported by: Anhui Xirong Zhaobo Technology Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2025-01-01

Scheduled Completion Time: 2026-12-31

Date of Project Initiation: 2025-01-01

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