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Indexed by:期刊论文

Date of Publication:2011-09-01

Journal:Joint Meeting of the 10th Asia-Pacific Conference on Plasma Science and Technology (APCPST 2010)/153rd Symposium on Plasma Science for Materials (SPSM 2010)

Included Journals:SCIE、EI、CPCI-S、Scopus

Volume:11

Issue:5

Page Number:S131-S134

ISSN No.:1567-1739

Key Words:Dust removing; Annular electrodes; Periodical potential wells

Abstract:The behavior of dust particles in capacitively coupled plasmas with annular electrodes is investigated. With the application of modulated signals on the annular electrodes, the periodical potential wells can be produced and it can play an effective role on dust removing. We pay our attention to the relations between the dust removal efficiency and the modulated signals. It is presented that by increasing the applied voltage or the applied frequency on the annular electrodes, the dust removal efficiency increases significantly. It is also shown that with the increase of the dust diameter, the dust removal efficiency decreases. (C) 2011 Elsevier B. V. All rights reserved.