Experimental observation of standing wave effect in low-pressure 200 MHz capacitive discharges
Release Time:2019-03-11 Hits:
Indexed by: Conference Paper
Date of Publication: 2014-05-25
Included Journals: Scopus、EI
Abstract: [No abstract available]
Release Time:2019-03-11 Hits:
Indexed by: Conference Paper
Date of Publication: 2014-05-25
Included Journals: Scopus、EI
Abstract: [No abstract available]