location: Current position: Home >> Scientific Research >> Paper Publications

Influence of ion species ratio on the characteristic of sheath with dielectric target for plasma source ion implantation

Hits:

Indexed by:会议论文

Date of Publication:2008-01-01

Pre One:Comparison between dual radio frequency- and pulse-driven sheath near insulating substrates

Next One:Energy loss of a charged particle moving outside the nano-dielectric sphere covered with metal film