Current position: Home >> Scientific Research >> Paper Publications

Effect of pulse duration on characteristics of modulated radio-frequency SiH4/N2/NH3 discharges

Release Time:2019-03-12  Hits:

Indexed by: Conference Paper

Date of Publication: 2010-01-01

Prev One:Fluid simulation for influence of metastable atoms on the characteristics of capacitively coupled argon plasmas

Next One:Two-dimensional fluid simulation of VHF capacitively coupled plasmas for silane discharge
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep