Current position: Home >> Scientific Research >> Paper Publications

Fluid simulation for influence of metastable atoms on the characteristics

Release Time:2019-03-12  Hits:

Indexed by: Journal Article

Date of Publication: 2010-01-01

Journal: PHYSICS OF PLASMAS

Volume: 17

Issue: 3

Page Number: 33507-33507

Prev One:Effects of matching network on the hysteresis during E and H mode

Next One:Two-dimensional hybrid simulation of capacitively coupled plasmas with two rf sources